These models can be used either offline to provide the optimal process cycle, or online to provide optimal, real-time process control [3]. This is the target of the iREMO project (www.iremo.eu), an EC ...
On-line monitoring techniques have been under development over the past decades for a variety of applications in process and power industries. In the nuclear power industry, on-line monitoring ...
The semiconductor manufacturing process involves many steps, including, but not limited to, film deposition, photolithography, etching, and chemical mechanical polishing (CMP). Contamination can ...
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